3 Rotary Target Plasma Sputtering Coater w. Substrate Heater
(500°C) Including 3 Targets - Introduction is a CE
certified compact three rotary target plasma sputtering coater with
a touch screen digital controller, and a substrate heater capable
of heating up to 500 °C. It can coat 1- 3 types of metallic
materials to sample with diameter up to 50 mm. Three sputtering
targets: gold, silver, copper are included for immediate use.
SpecificationInput PowerSingle phase 220 VAC, 50 / 60Hz700 W
(including vacuum pump)For using 110V AC, we will include a
transformer for you. Please select the voltage in the Product
OptionsOutput Power1600 VDC40 mA maxVacuum ChamberVacuum chamber:
150 mm ID x 150 mm H, made of high purity quartzSealing flange made
of stainless steel with flat O-ringSample Stage with HeaterStage
size: 50 mm Dia.Sputtering distance range: 25 - 40 mm
adjustableRotatable stage with three sputtering positions
(controlled by the touch screen)Substrate heater is built-in
with a maximum heating temperature of 500 °CPID temperature
controller with +/- 1 °C accuracy is integrated to the touch
screenControl Panel 6" color touch screen with PLC integration
for easy operationVacuum gauge, sputtering current meter, and
substrate temperature control are integrated to the touch screen
panelAdjustment knobs on the front panel for gas intake and
sputtering current controlSputtering position, sputtering timer,
and process logging are accessible from the touch
screenShieldStainless steel shield cage is included for extra
protectionSputtering Targets Target size requirements: 47 mm
Dia. x 2.5 mm maxThree targets are included in standard package for
immediate use:Au target, 47 mm Dia. x 0.12 mmAg target, 47 mm Dia.
x 0.5 mmCu target, 47 mm Dia. x 2.5 mmVacuum
Pump(Optional) Built-in KF25 vacuum port for connecting to a
vacuum pumpVacuum pump with KF25 connector is required, but not
included. User may chooseA double stage mechanical vacuum
pump for vacuum up to 10^-2 TorrOr a turbo pump for
vacuum up to 10^-4 TorrVacuum pump can be plugged in the power
outlet on the left of coater for automatic controlDimensions440 mm
L × 330 mm W × 455 mm HNet Weight50 kgZhengzhou CY Scientific
Instrument Co., Ltd is mainly engaged in the research and
development, design, manufacturing and sales of equipment used in
scientific researches. Independence and innovation is the company's
tenet.Our main products include: tube furnace, muffle furnace,
plasma cleaner, vacuum furnace, atmosphere furnace,CVD system and
customizedlab equipment.Welcome you come to visit us.
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